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April.19.2024
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Browse service/equipment details, related files and status history
Service Details
Live Usage
Service Details
specifications
Select Equipment:
Chem Spin Rinse Dryers (CNSI)
Chem Wetbenches (CNSI)
Chem Wetbenches (E-IV)
Dep ALD - Ultratech Fiji (E-IV)
Dep ALD - Ultratech Savannah (E-IV)
Dep e-beam Evaporator - CHA Mark 40-1(old) (E-IV)
Dep e-beam Evaporator - CHA Mark 40-2(new) (E-IV)
Dep e-beam Evaporator - CHA Mark 40-3 (CNSI)
Dep e-beam Evaporator - CHA Solution (CNSI)
Dep e-beam Evaporator - Sloan (E-IV)
Dep LPCVD Nitride/Poly/LTO - Reservations (E-IV)
Dep LPCVD LTO - Tystar Titan II-Tube 4 (E-IV)
Dep LPCVD Nitride - Tystar-Tube 2 (E-IV)
Dep LPCVD Nitride Low Stress - Tystar-Tube2(E-IV)
Dep LPCVD Polysilicon - Tystar-Tube 3 (E-IV)
Dep Oxidation - Tystar Tytan 3600-Tube 1 (CNSI)
Dep Oxidation - Tystar Tytan 3600-Tube 2 (CNSI)
Dep Oxidation - Tystar-Tube 1 (E-IV)
Dep Parylene - SCS 2010 (E-IV)
Dep Parylene - SCS PDS-2010 (CNSI)
Dep PECVD - BMR (E-IV)
Dep PECVD - Plasma Therm 790 (E-IV)
Dep PECVD - Plasma Therm Vision (CNSI)
Dep PECVD - STS Multiplex CVD (E-IV)
Dep Sputter - CVC 601 (E-IV)
Dep Sputter - Denton Desk II (SEM) (E-IV)
Dep Sputter - Denton Desk V (CNSI)
Dep Sputter - Denton Discovery (E-IV)
Dep Sputter - Ulvac JSP-8000 (CNSI)
Etch Asher - Matrix 105 (CNSI)
Etch Asher - Matrix 105 (E-IV)
Etch Asher - PE100 Plasma System (CNSI)
Etch Asher - Tegal (E-IV)
Etch Chlorine - PlasmaTherm SLR 770 ICP (E-IV)
Etch Chlorine - ULVAC NE-550 (CNSI)
Etch DRIE - PlasmaTherm DSE III FDRIE (E-IV)
Etch DRIE - Unaxis (E-IV)
Etch FIB - FEI Nova 600 (E-IV)
Etch Fluorine - Oxford 80+ (CNSI)
Etch Fluorine - Oxford 80+ (E-IV)
Etch Fluorine - STS AOE (E-IV)
Etch Fluorine - Technics Micro RIE 800 (E-IV)
Etch Fluorine - ULVAC NLD 570 (E-IV)
Etch HF Vapor - AMMT (E-IV)
Etch Porous Silicon - AMMT (E-IV)
Etch XeF2 - Lee No. 1 (E-IV)
Litho Aligner - Karl Suss 1 MA6 (E-IV)
Litho Aligner - Karl Suss 2 MA6 (E-IV)
Litho Aligner - Karl Suss 3 MA6 (E-IV)
Litho Aligner - Karl Suss 4 MA6 (CNSI)
Litho Coater - Headway PWM32 (CNSI)
Litho Coater -Headway PWM32 (E-IV)
Litho e-Beam Writer - Raith EBPG 5000+ES (CNSI)
Litho Mask Writer - Heidlberg DWL 66 (E-IV)
Litho Stepper - ASML PAS 5500/200 (CNSI)
Litho Track Coat - SVG 8800 (CNSI)
Litho Track Develop - SVG 8800 (CNSI)
Litho Writer - MIVATek 1201L (CNSI)
Meas 4 Point Probe - CDE ResMap (E-IV)
Meas 4 Point Probe - Omnimap RS35C (CNSI)
Meas Ellipsometer - ULVAC UNECS 2000 (E-IV)
Meas Goniometer - AST 3000s (CNSI)
Meas Microscopes (CNSI)
Meas Microscopes (E-IV)
Meas Optical Profiler - Wyko NT3300 (E-IV)
Meas Probe - M & M (CNSI)
Meas Probe - M & M (E-IV)
Meas Profilometer - Veeco Dektak 150 (CNSI)
Meas Profilometer - Veeco Dektak 6 (E-IV)
Meas Profilometer - Veeco Dektak 8 (E-IV)
Meas Reflectometer - Nanospec 210 (E-IV)
Meas Reflectometer - Nanospec 2100 (CNSI)
Meas Reflectometer - SCI Filmtek 2000 (E-IV)
Meas SEM - Hitachi S4700 (E-IV)
Meas Stress - Tencor Flexus 2320A (E-IV)
Misc Bonder - Karl Suss SB 8e (CNSI)
Misc Bonder - Karl Suss SB6-1 (E-IV)
Misc Polish - G&P Poli400L (E-IV)
Misc Polish - Logitech CDP (E-IV)
Misc Polish - Logitech PM5 (E-IV)
Misc Scribe and Break - Loomis LSD100 (CNSI)
Misc Supercritical Dryer - Tousimis (CNSI)
Misc Supercritical Dryer - Tousimis (E-IV)
Misc UV - Fusion (CNSI)
Misc UV Cure - Jelight 42 (CNSI)
Therm Anneal - Tystar (E-IV)
Therm Oven - Carbolite HTCR6 28 (E-IV)
Therm Oven - Carbolite HTCR6 28 (CNSI)
Therm Oven - VWR Vacuum Oven (E-IV)
Therm Oven HMDS - YES LPIII (CNSI)
Therm Oven Vacuum - YES LPIII (CNSI)
Therm RTP - MPTC 600xp (CNSI)
Therm RTP - MPTC 650 (E-IV)
Training - General Lithography (E-IV)
Refresh Pending
Chem Spin Rinse Dryers (CNSI)
Short Name:
C_SRD_CNSI
Category:
Chemical
Staff 1:
Lorna Tokunaga
Staff 2:
Brian Matthews
Super Users:
N/A
Equipment Status:
Decommissioned
Trainings Required:
1
Location:
CNSI
Comments:
Files and resources
There Are No Files Available!
equipment status history
Update Date
Status
Comments
Updated By
4/10/2024 10:20:05 AM
Decommissioned
EDAX was removed from system in March 2024.
Brian Matthews
2/12/2023 11:38:34 PM
In Use
Comment...
Tom Lee
1/5/2023 9:53:30 AM
UP
Comment...
Brian Matthews
6/22/2020 4:05:02 PM
UP
Comment...
Brian Matthews
6/22/2020 4:04:56 PM
DOWN - Installation
Comment...
Brian Matthews
6/22/2020 4:04:53 PM
In Use
Comment...
Brian Matthews
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